Micro-hole chip technology

Product Announcement from First Sensor AG

Micro-hole chip technology-Image

With its latest PIN photodiode development First Sensor opens up a new possibility formounting light sources or optical fibers inside a highperformance detector chip in a very precise andcompact manner. The open area inside of a detector die may be coveredwith a mask pattern or any wavelength filter structure. Hole dimensions can be adapted to the needs of anylaser or LED light source or a specific beam dimension. This micro?hole chip technology can be used in light scattering applications as well for other axissymmetrical detector system geometries and very tiny tube mounted detection systems. The chipsare suitable for switches in harsh environments, end point and color detectors and to detect tinyobjects or their moving directions. In the figure below we present the layout of a single area detector using a centered 500 μm squarehole for the light source. The figure also shows the measured dark current characteristic. Other geometries can be designed to provide the optimized detector solution.

The presented technology can also be applied to multi spectral measurement using stacked chips as drafted in the next figure. By properly designing the upper and lower diode the detector can be adopted to the application.

First Sensor AG provides cutting edge technology for sophisticated sensor applications. For full details and customization options contact us or visit us in Munich at the LASER (Hall C1, Booth 640) or in Nürnberg at the Sensor+Test (Hall 12, Booth 135).

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