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Sensirion's mass flow controller SFC3000 offers fast and accurate control of gas flows over a very wide range

The high performance of the MFC is mainly based on the CMOSens® mass flow sensor used in it. The latter is characterized by Sensirion's unsurpassed sensor technology which combines a high precision sensor element with the amplification and A/D converter circuit on one single CMOS chip. The digitally calibrated and temperature compensated sensor signal is converted directly into a signal which is used in the digital controlling circuit to control the valve. This results in very high accuracy, fast settling time and a large dynamic range.

The SFC3000 is a small, fully digital mass flow controller for high-volume OEM applications. Its excellent stability and repeatability make it ideal for analytical instruments. Different gas types and control ranges can be calibrated and switched by software.